SPUTTERING OF A15 NB3GE WITH CONTROLLED ADDITIONS OF OXYGEN

被引：16

作者：

SOMEKH, RE

机构：

来源：

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES | 1978年 / 37卷 / 06期

关键词：

D O I：

10.1080/01418637808225650

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：713 / 730

页数：18

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