SPUTTERING OF A15 NB3GE WITH CONTROLLED ADDITIONS OF OXYGEN

被引:16
作者
SOMEKH, RE
机构
来源
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES | 1978年 / 37卷 / 06期
关键词
D O I
10.1080/01418637808225650
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
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页码:713 / 730
页数:18
相关论文
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