NATIONAL SUB-MICRON FACILITY

[1] BARNARD J, 1979 INT EL DEV M WA

[2] HANSON GK, 1979, 15TH S EL ION PHOT B

[3] 400-A HIGH ASPECT-RATIO LINES PRODUCED IN POLYMETHYL METHACRYLATE (PMMA) BY ION-BEAM EXPOSURE [J]. APPLIED PHYSICS LETTERS, 1979, 35 (05) : 395 - 397

[4] DIAMOND - EFFICIENT SOURCE OF SOFT X-RAYS FOR HIGH-RESOLUTION X-RAY LITHOGRAPHY [J]. JOURNAL OF APPLIED PHYSICS, 1978, 49 (11) : 5365 - 5367

[5] WOOD CB, UNPUBLISHED

[1] BARNARD J, 1979 INT EL DEV M WA

[2] HANSON GK, 1979, 15TH S EL ION PHOT B

[3] 400-A HIGH ASPECT-RATIO LINES PRODUCED IN POLYMETHYL METHACRYLATE (PMMA) BY ION-BEAM EXPOSURE [J]. APPLIED PHYSICS LETTERS, 1979, 35 (05) : 395 - 397

[4] DIAMOND - EFFICIENT SOURCE OF SOFT X-RAYS FOR HIGH-RESOLUTION X-RAY LITHOGRAPHY [J]. JOURNAL OF APPLIED PHYSICS, 1978, 49 (11) : 5365 - 5367

[5] WOOD CB, UNPUBLISHED