A SINGLE-CRYSTAL CARBON SELF-SPUTTERING SIMULATION

被引:15
作者
SMITH, R [1 ]
WEBB, RP [1 ]
机构
[1] UNIV SURREY, DEPT ELECTR & ELECT ENGN, GUILDFORD GU2 5XH, SURREY, ENGLAND
关键词
D O I
10.1016/0168-583X(91)95835-2
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Carbon bombardment of graphite and diamond is investigated by molecular dynamics simulations using a many-body potential to describe the low energy interactions splined to a Moliere potential which describes the hard collisions. It is found that no ejection takes place from the perfect graphite {1000} face at bombardment energies of 100 eV and that at normal incidence the yield is below 1% up to 600 eV. At oblique incidence corresponding to the maximum yield angle, the yield can be in excess of ten times that at normal incidence and a much larger proportion of dimer and trimer molecules are ejected. The bulk terminated diamond surfaces are found to be less resistant to erosion than graphite with as much as 23% of material ejected at normal incidence being in the form of dimers.
引用
收藏
页码:1378 / 1382
页数:5
相关论文
共 24 条
  • [1] EMPIRICAL CHEMICAL PSEUDOPOTENTIAL THEORY OF MOLECULAR AND METALLIC BONDING
    ABELL, GC
    [J]. PHYSICAL REVIEW B, 1985, 31 (10): : 6184 - 6196
  • [2] SPUTTERING STUDIES WITH THE MONTE-CARLO PROGRAM TRIM.SP
    BIERSACK, JP
    ECKSTEIN, W
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1984, 34 (02): : 73 - 94
  • [3] Brenner D. W., 1988, MATER RES SOC S P, V141, P59, DOI [10.1557/PROC-141-59, DOI 10.1557/PROC-141-59]
  • [4] EMPIRICAL POTENTIAL FOR HYDROCARBONS FOR USE IN SIMULATING THE CHEMICAL VAPOR-DEPOSITION OF DIAMOND FILMS
    BRENNER, DW
    [J]. PHYSICAL REVIEW B, 1990, 42 (15): : 9458 - 9471
  • [5] BROWN WL, 1986, NATO ADV SCI INST E, V112, P338
  • [6] SHADOW-CONE-ENHANCED SECONDARY-ION MASS-SPECTROMETRY STUDIES OF AG(110)
    CHANG, CC
    WINOGRAD, N
    [J]. PHYSICAL REVIEW B, 1989, 39 (06): : 3467 - 3474
  • [7] SELF-SPUTTERING AND REFLECTION
    ECKSTEIN, W
    BIERSACK, JP
    [J]. ZEITSCHRIFT FUR PHYSIK B-CONDENSED MATTER, 1986, 63 (01): : 109 - 120
  • [8] APPLICATION OF MOLECULAR-DYNAMICS SIMULATIONS TO THE STUDY OF ION-BOMBARDED METAL-SURFACES
    HARRISON, DE
    [J]. CRC CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES, 1988, 14 : S1 - S78
  • [9] MCHARGUE CJ, 1991, NATO ASI E
  • [10] MOLIERE G, 1947, Z NATURFORSCH A, V2, P133