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GAS SENSITIVITIES OF SILICON MIS CAPACITORS INCORPORATED WITH CATALYST AND ADSORPTIVE OXIDE LAYERS
被引:7
作者:
KANG, WP
KIM, CK
机构:
[1] Solid State Microelectronics Laboratory, Department of Electrical Engineering, Vanderbilt University, Nashville
关键词:
D O I:
10.1149/1.2220839
中图分类号:
O646 [电化学、电解、磁化学];
学科分类号:
081704 ;
摘要:
A new family of gas sensors based on catalyst-adsorptive oxide-Si3N4-SiO2-Si-Al MIS capacitor has been developed. The structure integrates the catalytic properties of Pd, Pt, or Ag as a thin catalyst layer, and the gas sensing properties of SnO(x) or ZnO as a gas adsorptive oxide with a surface sensitive silicon MIS capacitor. The choice of catalyst layer and adsorptive oxide employed in the structure modifies the gas sensing characteristics: gas selectivity, sensitivity, activation energy, and reaction rate constant. Moreover, the sensors can detect O2, H-2, and CO gases at a much lower temperature than conventional solid state gas detectors.
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页码:L125 / L127
页数:3
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