GAS SENSITIVITIES OF SILICON MIS CAPACITORS INCORPORATED WITH CATALYST AND ADSORPTIVE OXIDE LAYERS

被引:7
作者
KANG, WP
KIM, CK
机构
[1] Solid State Microelectronics Laboratory, Department of Electrical Engineering, Vanderbilt University, Nashville
关键词
D O I
10.1149/1.2220839
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
A new family of gas sensors based on catalyst-adsorptive oxide-Si3N4-SiO2-Si-Al MIS capacitor has been developed. The structure integrates the catalytic properties of Pd, Pt, or Ag as a thin catalyst layer, and the gas sensing properties of SnO(x) or ZnO as a gas adsorptive oxide with a surface sensitive silicon MIS capacitor. The choice of catalyst layer and adsorptive oxide employed in the structure modifies the gas sensing characteristics: gas selectivity, sensitivity, activation energy, and reaction rate constant. Moreover, the sensors can detect O2, H-2, and CO gases at a much lower temperature than conventional solid state gas detectors.
引用
收藏
页码:L125 / L127
页数:3
相关论文
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