SYNCHROTRON RADIATION-INDUCED METAL-DEPOSITION ON SEMICONDUCTORS - MO(CO)6 ON SI(111)

被引：35

作者：

ZANONI, R

PIANCASTELLI, MN

MCKINLEY, J

MARGARITONDO, G

机构：

[1] UNIV ROMA TOR VERGATA,DIPARTIMENTO SCI & TECNOL CHIM,I-00173 ROME,ITALY

[2] UNIV WISCONSIN,CTR SYNCHROTRON RADIAT,MADISON,WI 53706

[3] UNIV WISCONSIN,DEPT PHYS,MADISON,WI 53706

来源：

APPLIED PHYSICS LETTERS | 1989年 / 55卷 / 10期

关键词：

D O I：

10.1063/1.101722

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1020 / 1022

页数：3

共 13 条

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