SPUTTERING OF SILICON WITH A+2 IONS

被引：15

作者：

WOLSKY, SP

ZDANUK, EJ

机构：

来源：

PHYSICAL REVIEW | 1961年 / 121卷 / 02期

关键词：

D O I：

10.1103/PhysRev.121.374

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：374 / &

共 9 条

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