PRECISION OF ELLIPSOMETER NULLING

被引：17

作者：

MERKT, U

机构：

来源：

APPLIED OPTICS | 1981年 / 20卷 / 02期

关键词：

D O I：

10.1364/AO.20.000307

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：307 / 311

页数：5

共 15 条

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[9] OPTICAL-CONSTANTS OF PURE AND CO-COVERED COPPER-FILMS [J].

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[10] ELLIPSOMETRIC STUDY OF CO ADSORPTION ON EVAPORATED NI-FILMS [J].

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