IMPROVEMENT OF SPATIAL-RESOLUTION OF A LASER-SCANNING PH-IMAGING SENSOR

被引：64

作者：

NAKAO, M

YOSHINOBU, T

IWASAKI, H

机构：

[1] The Institute of Scientific and Industrial Research, Osaka University, Ibaraki, Osaka, 567

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1994年 / 33卷 / 3A期

关键词：

PH-IMAGING SENSOR; PH SENSOR; SEMICONDUCTOR; SPATIAL RESOLUTION; LASER-SCANNING;

D O I：

10.1143/JJAP.33.L394

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We investigated the spatial resolution of a laser-scanning semiconductor-based pH-imaging sensor both experimentally and theoretically. A spatial resolution better than 100 mum was obtained by thinning the Si substrate to 100 mum. The simulation results on the spatial resolution based on a carrier diffusion model agreed well with those obtained by experiment. From the simulation results, we also predicted the optimal choice of parameters of Si substrate (thickness, doping, etc.) for the pH-imaging sensor.

引用

页码：L394 / L397

页数：4

共 11 条

[1] SCANNED LIGHT-PULSE TECHNIQUE FOR THE INVESTIGATION OF INSULATOR SEMICONDUCTOR INTERFACES [J].