ANGULAR-SELECTIVE OPTICAL TRANSMITTANCE OF HIGHLY TRANSPARENT AL-OXIDE-BASED FILMS MADE BY OBLIQUE-ANGLE SPUTTERING

被引：14

作者：

LEBELLAC, D ^{[1
]}

NIKLASSON, GA ^{[1
]}

GRANQVIST, CG ^{[1
]}

机构：

[1] UNIV UPPSALA,DEPT TECHNOL,S-75121 UPPSALA,SWEDEN

来源：

JOURNAL OF APPLIED PHYSICS | 1995年 / 78卷 / 04期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1063/1.360034

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Films with angular and spectral selectivity of the optical transmittance were produced by reactive magnetron sputtering with oblique incidence of the deposition species towards a substrate. These data could be reconciled with multiparameter fits to a model based on the Maxwell Garnett effective medium theory applied to a three-component structure with inclined columns, surrounded by voids, comprised of elongated Al particles in an Al2O3 matrix. (C) 1995 American Institute of Physics.

引用

页码：2894 / 2896

页数：3