HIGH-ACCURACY TUNING OF PLANAR MILLIMETER-WAVE CIRCUITS BY LASER PHOTOCHEMICAL ETCHING

被引：3

作者：

EHRLICH, DJ ^{[1
]}

WILLIAMS, DF ^{[1
]}

SEDLACEK, JHC ^{[1
]}

ROTHSCHILD, M ^{[1
]}

SCHWARZ, SE ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY,DEPT ELECT ENGN,BERKELEY,CA 94720

来源：

关键词：

D O I：

10.1109/EDL.1987.26569

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：110 / 112

页数：3

共 7 条

[1] EHRLICH DJ, 1983, J VAC SCI TECHNOL B, V1, P969, DOI 10.1116/1.582718
[2] Ramo S., 1984, FIELDS WAVES COMMUNI
[3] LASER PHOTOCHEMICAL ETCHING OF MOLYBDENUM AND TUNGSTEN THIN-FILMS BY SURFACE HALOGENATION
ROTHSCHILD, M
SEDLACEK, JHC
EHRLICH, DJ
[J]. APPLIED PHYSICS LETTERS, 1986, 49 (22) : 1554 - 1556
[4] ROTHSCHILD M, 1987, IN PRESS J VAC SCI B
[5] A PLANAR SUBHARMONICALLY-PUMPED 71 GHZ RECEIVER WITH INTEGRAL FEED ANTENNA
WILLIAMS, DF
SCHWARZ, SE
[J]. INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES, 1986, 7 (02): : 183 - 195
[6] WILLIAMS DF, 1986, THESIS U CALIF BERKE
[7] WILLIAMS DF, 1986, UNPUB