EFFECT OF DILUTION GASES IN METHANE ON THE DEPOSITION OF DIAMOND-LIKE CARBON IN A MICROWAVE-DISCHARGE .3. EFFECT OF RARE-GASES

被引：4

作者：

HAYASHI, F

UYAMA, H

MATSUMOTO, O

机构：

[1] Department of Chemistry, Aoyama Gakuin University, Setagaya-ku, Tokyo, 157, Chitosedai

来源：

THIN SOLID FILMS | 1990年 / 189卷 / 02期

关键词：

D O I：

10.1016/0040-6090(90)90460-U

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Diamond-like carbon was prepared by decomposition of CH4 in a microwave discharge. The effect of rare gases, such as argon, krypton and xenon, as dilution gases on the deposition of diamond-like carbon was examined by identifying the deposits and from the results of plasma diagnostics. When the CH4 was diluted with rare gases, the deposits consisted of graphite. In contrast, the deposit was mainly diamond when the CH4 was diluted with hydrogen. It is clarified that quenching of excited carbon species by hydrogen atoms is necessary for the deposition of diamond through the formation of CHx in the plasma. © 1990.

引用

页码：313 / 319

页数：7

共 13 条

[1] GROWTH OF DIAMOND SEED CRYSTALS BY VAPOR DEPOSITION [J].