EFFECT OF DILUTION GASES IN METHANE ON THE DEPOSITION OF DIAMOND-LIKE CARBON IN A MICROWAVE-DISCHARGE .2. EFFECT OF HYDROGEN

被引：60

作者：

MATSUMOTO, O

KATAGIRI, T

机构：

来源：

THIN SOLID FILMS | 1987年 / 146卷 / 03期

关键词：

D O I：

10.1016/0040-6090(87)90435-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：283 / 289

页数：7

共 12 条

[1] GROWTH OF DIAMOND SEED CRYSTALS BY VAPOR DEPOSITION [J].

ANGUS, JC ;

WILL, HA ;

STANKO, WS .

JOURNAL OF APPLIED PHYSICS, 1968, 39 (06) :2915-&

[2]

ASHIDA K, 1984, J NUCL MATER, V128, P564

[3]

KAMO M, 1983, J CRYST GROWTH, V62, P4590

[4]

KAMO M, 1984, NIPPON KAGAKU KAISHI, P1462

[5] DIAMOND SYNTHESIS IN COOL PLASMA [J].

MANIA, R ;

STOBIERSKI, L ;

PAMPUCH, R .

CRYSTAL RESEARCH AND TECHNOLOGY, 1981, 16 (07) :785-788

[6] EFFECT OF DILUTION GASES IN METHANE ON THE DEPOSITION OF DIAMOND-LIKE CARBON IN A MICROWAVE-DISCHARGE [J].

MATSUMOTO, O ;

TOSHIMA, H ;

KANZAKI, Y .

THIN SOLID FILMS, 1985, 128 (3-4) :341-351

[7]

MORI T, 1984, J APPL PHYS, V55, P3276, DOI 10.1063/1.333385

[8] CHARGE TRANSFER IN TRANSITION METAL CARBIDES AND RELATED COMPOUNDS STUDIED BY ESCA [J].

RAMQVIST, L ;

HAMRIN, K ;

JOHANSSON, G ;

FAHLMAN, A ;

NORDLING, C .

JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1969, 30 (07) :1835-+

[9] VAPOR GROWTH OF DIAMOND ON DIAMOND AND OTHER SURFACES [J].

SPITSYN, BV ;

BOUILOV, LL ;

DERJAGUIN, BV .

JOURNAL OF CRYSTAL GROWTH, 1981, 52 (APR) :219-226

[10] CHEMICAL EVAPORATION AND DEPOSITION OF SOLIDS IN A NONISOTHERMAL PLASMA - CHEMICAL TRANSPORT OF CARBON [J].

VEPREK, S .

JOURNAL OF CRYSTAL GROWTH, 1972, 17 (DEC) :101-&

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