CO2-LASER ANNEALING OF SI3N4, NB2O5, AND TA2O5 THIN-FILM OPTICAL-WAVEGUIDES TO ACHIEVE SCATTERING LOSS REDUCTION

被引：48

作者：

DUTTA, S

JACKSON, HE

BOYD, JT

DAVIS, RL

HICKERNELL, FS

机构：

[1] UNIV CINCINNATI,DEPT PHYS,CINCINNATI,OH 45221

[2] UNIV CINCINNATI,DEPT ELECT & COMP ENGN,SOLID STATE ELECTR LAB,CINCINNATI,OH 45221

来源：

IEEE JOURNAL OF QUANTUM ELECTRONICS | 1982年 / 18卷 / 04期

关键词：

D O I：

10.1109/JQE.1982.1071579

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：800 / 806

页数：7

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