RIDGE WAVE-GUIDES AND ELECTRO-OPTICAL SWITCHES IN LINBO3 FABRICATED BY ION-BOMBARDMENT-ENHANCED ETCHING

被引：11

作者：

KAWABE, M ^{[1
]}

HIRATA, S ^{[1
]}

NAMBA, S ^{[1
]}

机构：

[1] OSAKA UNIV,FAC ENGN SCI,TOYONAKA,OSAKA 560,JAPAN

来源：

IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS | 1979年 / 26卷 / 12期

关键词：

D O I：

10.1109/TCS.1979.1084608

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1109 / 1113

页数：5

共 15 条

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APPLIED PHYSICS LETTERS, 1975, 26 (11) :640-642

[2] VOLTAGE-INDUCED OPTICAL WAVEGUIDE [J].

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[3] EFFICIENT STRIP-WAVEGUIDE MODULATOR [J].

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TURNER, EH .

APPLIED PHYSICS LETTERS, 1975, 27 (10) :555-557

[4] OPTICAL WAVEGUIDING LAYERS IN LINBO3 AND LITAO3 [J].

KAMINOW, IP ;

CARRUTHERS, JR .

APPLIED PHYSICS LETTERS, 1973, 22 (07) :326-328

[5] LITHIUM-NIOBATE RIDGE WAVEGUIDE MODULATOR [J].

KAMINOW, IP ;

RAMASWAMY, V .

APPLIED PHYSICS LETTERS, 1974, 24 (12) :622-624

[6] MICROFABRICATION IN LINBO3 BY ION-BOMBARDMENT-ENHANCED ETCHING [J].

KAWABE, M ;

KUBOTA, M ;

MASUDA, K ;

NAMBA, S .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (03) :1096-1098

[7] ELECTROOPTIC COUPLING BETWEEN TE AND TM MODES IN ANISOTROPIC SLABS [J].

MARCUSE, D .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1975, 11 (09) :759-767

[8] ELECTROOPTIC INTENSITY MODULATION IN LITAO3 RIDGE WAVEGUIDE [J].

NODA, J ;

UCHIDA, N ;

MINAKATA, M ;

SAKU, T ;

SAITO, S ;

OHMACHI, Y .

APPLIED PHYSICS LETTERS, 1975, 26 (06) :298-300

[9]

NODA J, 1977, 1977 INT C INT OPT O, P575

[10] ELECTRO-OPTIC LIGHT MODULATOR WITH BRANCHED RIDGE WAVEGUIDE [J].

OHMACHI, Y ;

NODA, J .

APPLIED PHYSICS LETTERS, 1975, 27 (10) :544-546

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