ABLATION OF SILICATE-GLASSES BY LASER IRRADIATION - MODELING AND EXPERIMENTAL RESULTS

被引：5

作者：

BUERHOP, C ^{[1
]}

WEISSMANN, R ^{[1
]}

LUTZ, N ^{[1
]}

机构：

[1] UNIV ERLANGEN NURNBERG,LEHRSTUHL FERTIGUNGSTECHNOL,W-8520 ERLANGEN,GERMANY

来源：

APPLIED SURFACE SCIENCE | 1992年 / 54卷

关键词：

D O I：

10.1016/0169-4332(92)90042-V

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Mathematical models were developed to simulate laser treatment of fused silica and soda-lime-silicate glass (8 wt% Fe2O3). A 1.5 kW CO2 laser, a 200 W Nd:YAG laser, and a 2 J/20 Hz XeCl excimer laser were then used to treat each glass to investigate melting, softening, and ablation effects. The calculated temperature distributions agree well with the results on treated samples analysed using SEM and profilometry. The effects observed on each type of glass varied according to the laser system used and the applied power density.

引用

页码：187 / 192

页数：6