PHOTODETACHMENT EFFECT IN A RADIO-FREQUENCY PLASMA IN CF4

被引:28
作者
JAUBERTEAU, JL
MEEUSEN, GJ
HAVERLAG, M
KROESEN, GMW
DEHOOG, FJ
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关键词
D O I
10.1063/1.101990
中图分类号
O59 [应用物理学];
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页码:2597 / 2599
页数:3
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