AN ABUTTABLE CCD IMAGER FOR VISIBLE AND X-RAY FOCAL PLANE ARRAYS

被引：181

作者：

BURKE, BE ^{[1
]}

MOUNTAIN, RW ^{[1
]}

HARRISON, DC ^{[1
]}

BAUTZ, MW ^{[1
]}

DOTY, JP ^{[1
]}

RICKER, GR ^{[1
]}

DANIELS, PJ ^{[1
]}

机构：

[1] MIT,CTR SPACE RES,CAMBRIDGE,MA 02139

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1991年 / 38卷 / 05期

基金：

美国国家航空航天局;

关键词：

D O I：

10.1109/16.78381

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A frame-transfer silicon CCD imager has been developed that can be closely abutted to other imagers on three sides of the imaging array and is intended for use in multichip arrays. The device has 420 x 420 pixels in the imaging and frame-store regions and is constructed using a three-phase triple-polysilicon process. Particular emphasis has been placed on achieving low-noise charge detection for low-light-level imaging in the visible and maximum energy resolution for X-ray spectroscopic applications. Noise levels of 6 electrons at 1 MHz and less than 3 electrons at 100-kHz data rates have been achieved. Imagers have been fabricated on 1000-OMEGA . cm material to maximize quantum efficiency and minimize split events in the soft X-ray regime.

引用

页码：1069 / 1076

页数：8

共 16 条

[1] NOISE IN BURIED CHANNEL CHARGE-COUPLED-DEVICES [J].