SPUTTER-INDUCED MODIFICATION OF ALLOY COMPOSITION IN NEAR-SURFACE REGIONS

被引：20

作者：

REHN, LE

WIEDERSICH, H

机构：

来源：

THIN SOLID FILMS | 1980年 / 73卷 / 01期

关键词：

D O I：

10.1016/0040-6090(80)90340-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：139 / 143

页数：5

共 8 条

[1]

GOTO K, 1978, J VAC SCI TECHNOL, V15, P1695

[2] DETERMINATION OF SURFACE COMPOSITION OF CU-NI ALLOYS FOR CLEAN AND ADSORBATE-COVERED SURFACES [J].

HELMS, CR ;

YU, KY .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01) :276-278

[3] EFFECTS OF ENHANCED DIFFUSION ON PREFERRED SPUTTERING OF HOMOGENEOUS ALLOY SURFACES [J].

HO, PS .

SURFACE SCIENCE, 1978, 72 (02) :253-263

[4]

JOSHI A, 1979, INTERFACIAL SEGREGAT, P39

[5] PREFERENTIAL SPUTTERING OF CU-NI ALLOYS AT LOW-TEMPERATURE USING LOWER ENERGY AUGER-ELECTRON SPECTRA [J].

KOSHIKAWA, T ;

GOTO, K ;

SAEKI, N ;

SHIMIZU, R ;

SUGATA, E .

SURFACE SCIENCE, 1979, 79 (02) :461-469

[6]

MAISSEL LI, 1970, HDB THIN FILM TECHNO, P440

[7] SPUTTER-INDUCED SUBSURFACE SEGREGATION IN A CU-NI ALLOY [J].

REHN, LE ;

DANYLUK, S ;

WIEDERSICH, H .

PHYSICAL REVIEW LETTERS, 1979, 43 (23) :1764-1767

[8] ALLOY SPUTTERING STUDIES WITH IN-SITU AUGER ELECTRON SPECTROSCOPY [J].

TARNG, ML ;

WEHNER, GK .

JOURNAL OF APPLIED PHYSICS, 1971, 42 (06) :2449-&

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