ELECTRICAL AND STRUCTURAL-PROPERTIES OF EPITAXIAL CDTE/HGCDTE INTERFACES

被引:28
作者
ARIEL, V
GARBER, V
ROSENFELD, D
BAHIR, G
RICHTER, V
MAINZER, N
SHER, A
机构
[1] TECHNION ISRAEL INST TECHNOL,INST SOLID STATE,IL-32000 HAIFA,ISRAEL
[2] SCD,IL-31021 HAIFA,ISRAEL
[3] SOREQ NUCL RES CTR,IL-70600 YAVNE,ISRAEL
关键词
HGCDTE; METALORGANIC CHEMICAL VAPOR DEPOSITION (MOCVD); METAL INSULATOR SEMICONDUCTOR (MIS) DEVICES; PASSIVATION;
D O I
10.1007/BF02653070
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this study, CdTe epilayers were growth by metalorganic chemical vapor deposition on epitaxial HgCdTe with the purpose of developing suitable passivation for HgCdTe photodiodes. Two types of CdTe layers were investigated. One was grown directly, in situ, Immediately following the growth of HgCdTe. The second type of CdTe was grown indirectly, on top of previously grown epitaxial HgCdTe samples. In this case, the surface of the HgCdTe was exposed to ambient atmosphere, and a surface cleaning procedure was applied. The material and structural properties of the CdTe/HgCdTe interfaces were investigated using secondary ion mass spectroscopy, Auger electron spectroscopy, Rutherford back scattering, and x-ray double crystal diffractometry techniques. Electrical properties of the CdTe/HgCdTe heterostructure were determined by capacitance-voltage (C-V) characterization of Schottky barrier devices and metal insulator semiconductor devices. Also, a preliminary current-voltage characterization of n(+)p photodiodes was performed. A theoretical model suitable for analysis of graded heterojunction devices was used for interpretation of C-V measurements.
引用
收藏
页码:1169 / 1174
页数:6
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