SPATIAL PROFILING OF ION AND NEUTRAL EXCITATION IN NOBLE-GAS ELECTRON-CYCLOTRON-RESONANCE PLASMAS

Optical emission from neutrals and ions of several noble gases has been profiled in an electron cyclotron resonance plasma system. In argon plasmas with a net microwave power of 750 W, the neutral (696.5-nm) and ion (488-nm) emission profiles are slightly center peaked at 0.32 mTorr and gradually shift to a hollow appearance at 2.5 mTorr. Neon profiles show a similar trend from 2.5 to 10.0 mTorr. For the noble gases, transition pressure scales with the ionization potential of the gas, which is consistent with neutral depletion. Studies of noble gas mixtures, however, indicate that neutral depletion is not always dominant in the formation of hollow profiles. For Kr/Ar, Ar/Ne, and Ne/He plasmas, the majority gas tends to set the overall shape of the profile at any given pressure. For the conditions of the current system, plasma density appears to be more dominant than electron temperature in the formation of hollow profiles. The general method described is also a straightforward, inexpensive technique for measuring the spatial distribution of power deposited in plasmas, particularly where absolute scale can be calibrated by some other means. (C) 1994 American Institute of Physics.