MICROWAVE PLASMA STREAM TRANSPORT-SYSTEM FOR LOW-TEMPERATURE PLASMA OXIDATION

被引：37

作者：

MIYAKE, K

KIMURA, S

WARABISAKO, T

SUNAMI, H

TOKUYAMA, T

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1984年 / 2卷 / 02期

关键词：

D O I：

10.1116/1.572603

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：496 / 499

页数：4

共 13 条

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