PH-ISFET WITH NMOS TECHNOLOGY

被引:25
作者
ALEGRET, S
BARTROLI, J
JIMENEZ, C
DELVALLE, M
DOMINGUEZ, C
CABRUJA, E
MERLOS, A
机构
[1] UNIV AUTONOMA BARCELONA,DEPT QUIM,E-08193 BARCELONA,SPAIN
[2] UNIV AUTONOMA BARCELONA,CSIC,CTR NACL MICROELECTR,E-08193 BARCELONA,SPAIN
关键词
D O I
10.1002/elan.1140030418
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
The construction of a pH-ISFET (ion-selective field effect transistor) fabricated with standard negative-channel MOS technology, compatible with complementary MOS technology, and using silicon nitride as a pH-sensitive material, is described. Its main analytical characteristics are discussed. The resulting calibration plot is linear over the pH range from 2 to 11, with a slope of 54 mV per pH unit.
引用
收藏
页码:355 / 360
页数:6
相关论文
共 17 条
[11]  
JANATA J, 1985, SOLID STATE CHEM SEN, pCH2
[12]   TIME EFFECTS OF ION-SENSITIVE FIELD-EFFECT TRANSISTORS [J].
KLEIN, M .
SENSORS AND ACTUATORS, 1989, 17 (1-2) :203-208
[13]   METHODS OF ISFET FABRICATION [J].
MATSUO, T ;
ESASHI, M .
SENSORS AND ACTUATORS, 1981, 1 (01) :77-96
[14]   INTEGRATED FIELD-EFFECT ELECTRODE FOR BIOPOTENTIAL RECORDING [J].
MATSUO, T ;
WISE, KD .
IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING, 1974, BM21 (06) :485-487
[15]   POTASSIUM ION-SENSITIVE FIELD-EFFECT TRANSISTOR [J].
MOSS, SD ;
JANATA, J ;
JOHNSON, CC .
ANALYTICAL CHEMISTRY, 1975, 47 (13) :2238-2243
[16]   A PH-ISFET AND AN INTEGRATED PH-PRESSURE SENSOR WITH BACK-SIDE CONTACTS [J].
VANDENVLEKKERT, HH ;
KLOECK, B ;
PRONGUE, D ;
BERTHOUD, J ;
HU, B ;
DEROOIJ, NF ;
GILLI, E ;
DECROUSAZ, P .
SENSORS AND ACTUATORS, 1988, 14 (02) :165-176
[17]  
VANDENVLEKKERT HH, 1988, ANALUSIS, V16, P110