PROJECTION PHOTOLITHOGRAPHY BY WAVE-FRONT CONJUGATION

被引：54

作者：

LEVENSON, MD

JOHNSON, KM

HANCHETT, VC

CHIANG, K

机构：

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA | 1981年 / 71卷 / 06期

关键词：

D O I：

10.1364/JOSA.71.000737

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：737 / 743

页数：7

共 18 条

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[14]

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