SEGREGATED MICROSTRUCTURE AND CRYSTAL-STRUCTURE IN SPUTTER-DEPOSITED CO-CR CARBON-ADDED FILMS

被引：1

作者：

MASUYA, H ^{[1
]}

AWANO, H ^{[1
]}

机构：

[1] SONY MAGNET PROD INC,MIYAGI 985,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1989年 / 28卷 / 03期

关键词：

D O I：

10.1143/JJAP.28.372

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：372 / 378

页数：7

共 19 条

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