STUDY OF A MICROWAVE PLASMA CATHODE

被引：6

作者：

SUN, BH ^{[1
]}

ZHAO, W ^{[1
]}

机构：

[1] BEIJING UNIV,INST HEAVY ION PHYS,BEIJING,PEOPLES R CHINA

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1992年 / 63卷 / 04期

关键词：

D O I：

10.1063/1.1142850

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A microwave plasma cathode which will be used in CHORDIS source has been developed. In this paper, the structure and the working property of the cathode are described.

引用

页码：2598 / 2600

页数：3

共 3 条

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[3] DEVELOPMENT OF MICROWAVE PLASMA CATHODE FOR ION SOURCES [J].

MATSUBARA, Y ;

TAHARA, H ;

NOGAWA, S ;

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