DUAL-WAVEBAND OPERATION OF A MULTILAYER-COATED DIFFRACTION GRATING IN THE SOFT-X-RAY RANGE AT NEAR-NORMAL INCIDENCE

被引：27

作者：

KOWALSKI, MP

SEELY, JF

HUNTER, WR

RIFE, JC

BARBEE, TW

HOLLAND, GE

BOYER, CN

BROWN, CM

CRUDDACE, RG

机构：

[1] SFA INC, LANDOVER, MD 20785 USA

[2] USRA, WASHINGTON, DC 20024 USA

[3] LAWRENCE LIVERMORE NATL LAB, LIVERMORE, CA 94550 USA

来源：

APPLIED OPTICS | 1993年 / 32卷 / 13期

关键词：

DIFFRACTION GRATING; MULTILAYER COATING; EXTREME ULTRAVIOLET;

D O I：

10.1364/AO.32.002422

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A concave diffraction grating (2400 grooves/mm) coated with a Si/Mo multilayer has an efficiency of 2.5% at 290 angstrom and a resolving power of 14,000 in third order of 156 angstrom.

引用

页码：2422 / 2425

页数：4

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