OPTICOPYROMETRIC DETERMINATION OF TEMPERATURE IN AN AR ICP

被引：6

作者：

STROTHER, RE ^{[1
]}

BIELSKI, BA ^{[1
]}

MEEKS, FR ^{[1
]}

机构：

[1] UNIV CINCINNATI,DEPT CHEM,CINCINNATI,OH 45221

来源：

APPLIED SPECTROSCOPY | 1991年 / 45卷 / 06期

关键词：

EMISSION SPECTROSCOPY; INSTRUMENTATION; OPTICAL PYROMETRY; SPECTROSCOPIC TECHNIQUES;

D O I：

10.1366/0003702914336354

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The temperature/spatial profile of an Ar ICP has been obtained by two-color infrared (IR) optical pyrometry. The temperatures range from 1668 to 2543 K, depending upon position and radio frequency (rf) input power. Results show at powers of 1.5 to 2.0 kW that the spatial dependence of the temperature closely resembles the spatial dependence of electron number density, suggesting that the electron number density plays an important role in determining the thermodynamic temperature.

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收藏

页码：1031 / 1035

页数：5

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