TRANSMISSION ELECTRON-MICROSCOPY OBSERVATION OF THE CRYSTALLIZATION PROCESS IN REACTIVELY SPUTTERED A-GE-H/A-GENX MULTILAYER FILMS

被引：6

作者：

HONMA, I

KOMIYAMA, H

TANAKA, K

机构：

来源：

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES | 1989年 / 60卷 / 01期

关键词：

D O I：

10.1080/13642818908228809

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：3 / 9

页数：7

共 9 条

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[7] THE STRUCTURAL STABILITY OF REACTIVELY-SPUTTERED AMORPHOUS MULTILAYER FILMS [J].

HONMA, I ;

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[9]

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