SURFACE-MORPHOLOGY OF HEAT-TREATED CERAMIC THIN-FILMS

被引:41
作者
SUSNITZKY, DW [1 ]
CARTER, CB [1 ]
机构
[1] UNIV MINNESOTA,DEPT CHEM ENGN & MAT SCI,MINNEAPOLIS,MN 55455
关键词
D O I
10.1111/j.1151-2916.1992.tb05599.x
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The morphology of surfaces of several ceramic materials has been examined using transmission electron microscopy. The approach used was to prepare a sample for examination in the microscope, carefully clean it, and then heat-treat it. In the case of the oxides studied (alumina and spinel) the samples were heated in air; the non-oxides (alpha-SiC and beta-SiC) were annealed under vacuum. The morphology in all but one case was such that the surface faceted parallel to the nearest low-index plane to give well-defined terraces; these were separated by ledges which also tended to facet parallel to the traces of low-index planes. The exception was the {1100BAR} alumina surface, which appears to be unstable in air at temperatures close to 1400-degrees-C. A computer program using a multislice approach was used to estimate the height of the steps on the (0001) surface; the step heights appear to be multiples of the c lattice parameter. A reconstruction of this surface as a result of this heat treatment is also proposed.
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页码:2463 / 2478
页数:16
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