GETTERING OF GOLD AND COPPER WITH IMPLANTED CARBON IN SILICON

被引：76

作者：

WONG, H

CHEUNG, NW

CHU, PK

机构：

[1] CORNELL UNIV,NATL RES & RESOURCES FACIL SUBMICRON STRUCT,ITHACA,NY 14853

[2] CHARLES EVANS & ASSOCIATES,REDWOOD CITY,CA 94063

来源：

APPLIED PHYSICS LETTERS | 1988年 / 52卷 / 11期

关键词：

D O I：

10.1063/1.99263

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：889 / 891

页数：3

共 22 条

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[10] GOLD GETTERING IN SILICON BY PHOSPHORUS DIFFUSION AND ARGON IMPLANTATION - MECHANISMS AND LIMITATIONS [J].

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