GRAVIMETRIC ANALYSIS OF PORE NUCLEATION AND PROPAGATION IN ANODIZED SILICON

Weighing is one of the simplest methods of characterising porous silicon layers formed on anodised wafers. Extensive gravimetric data are presented on both microporous and mesoporous layers etched in p+, p- and n+ wafers using aqueous and ethanoic HF solutions. Further information has been extracted from these measurements so as to understand better the way in which the pores develop and grow.