DETERMINATION OF CHARGE OF MIGRATING IMPURITIES FROM ELECTRODIFFUSION PROFILES - SYSTEM A-AS2SE3=CU

被引：18

作者：

NEBAUER, E ^{[1
]}

SUPTITZ, P ^{[1
]}

WILLERT, I ^{[1
]}

机构：

[1] AKAD WISSENSCH DDR,ZENT INST ELEKTR PHYS,BERLIN,GER DEM REP

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1977年 / 43卷 / 02期

关键词：

D O I：

10.1002/pssa.2210430211

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：451 / 458

页数：8

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[9] ELECTROMIGRATION AND FAILURE IN ELECTRONICS - INTRODUCTION [J].

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[10]

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