DEPOSITION OF (100) ORIENTED MGO THIN-FILMS ON SAPPHIRE BY A SPRAY PYROLYSIS METHOD

被引:21
作者
DESISTO, WJ
HENRY, RL
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D O I
10.1063/1.103188
中图分类号
O59 [应用物理学];
学科分类号
摘要
Thin films of magnesia have been deposited by a novel spray pyrolysis method. An aqueous magnesium acetylacetonate solution was ultrasonically nebulized, transported in flowing oxygen, and thermally decomposed on silicon (100), sapphire, and fused silica at temperatures between 400 and 550°C. The films were from 0.1 to 0.5 μm thick, optically transparent, and smooth. The MgO films were poorly crystalline as deposited. MgO films on sapphire crystallized with strong (100) orientation after annealing at 700 and 930°C in flowing oxygen.
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页码:2522 / 2523
页数:2
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