PROPERTIES OF REACTIVELY-SPUTTERED COPPER-OXIDE THIN-FILMS

被引：210

作者：

DROBNY, VF

PULFREY, DL

机构：

[1] The University of British Columbia, Department of Electrical Engineering, Vancouver

来源：

THIN SOLID FILMS | 1979年 / 61卷 / 01期

关键词：

D O I：

10.1016/0040-6090(79)90504-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Reactive sputtering in oxygen-argon mixtures has been used to produce thin copper oxide films with a range of properties that can be controlled easily by varying the partial pressure of oxygen in the discharge. The properties of phase composition, resistivity and optical constants were investigated. The phases Cu+Cu2O, Cu2O, Cu2O+CuO, CuO were identified and each phase exhibited characteristic values of resistivity and optical constants. Cu2O prepared in this manner could be a useful thin film semiconductor material in view of its high refractive index in the visible range (n = 2.8-3.4), its low value of extinction coefficient below 2.5 eV and readily controllable resistivity over the approximate range 25-104 Ω cm. © 1979.

引用

页码：89 / 98

页数：10

共 22 条

[1] INVESTIGATION OF OXIDATION OF COPPER BY USE OF RADIOACTIVE CU TRACER
BARDEEN, J
BRATTAIN, WH
SHOCKLEY, W
[J]. JOURNAL OF CHEMICAL PHYSICS, 1946, 14 (12) : 714 - 721
[2] RESONANT QUADRUPOLE-DIPOLE RAMAN-SCATTERING AT S1 YELLOW EXCITON IN CU2O
COMPAAN, A
CUMMINS, HZ
[J]. PHYSICAL REVIEW LETTERS, 1973, 31 (01) : 41 - 44
[3] Drobny V. F., 1978, Thirteenth IEEE Photovoltaic Specialists Conference1978, P180
[4] DROBNY VF, 1978, THESIS U BRIT COLUMB
[5] ECONOMOU NA, 1977, 1977 P EUR COMM PHOT, P1180
[6] FORMAN RA, UNPUBLISHED
[7] The copper-cuprous-oxide rectifier and photoelectric cell
Grondahl, LO
[J]. REVIEWS OF MODERN PHYSICS, 1933, 5 (02) : 0141 - 0168
[8] OPTICAL-CONSTANTS OF CUPRIC OXIDE FROM 450 TO 800 MU
LADELFE, PC
BIEGEN, JR
CZANDERNA, AW
[J]. THIN SOLID FILMS, 1972, 10 (03) : 403 - +
[9] DERIVATION OF OPTICAL-CONSTANTS OF METALS FROM THIN-FILM MEASUREMENTS AT OBLIQUE-INCIDENCE
NESTELL, JE
CHRISTY, RW
[J]. APPLIED OPTICS, 1972, 11 (03): : 643 - &
[10] DETERMINATION OF OPTICAL CONSTANTS FROM INTENSITY MEASUREMENTS AT NORMAL INCIDENCE
NILSSON, PO
[J]. APPLIED OPTICS, 1968, 7 (03): : 435 - &

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