PROPERTIES OF SILICON FILMS PRODUCED BY FIELD-EMISSION DEPOSITION

被引:11
作者
PANG, TM [1 ]
PREWETT, PD [1 ]
GOWLAND, L [1 ]
机构
[1] UKAEA,CULHAM LAB,ABINGDON OX14 3DB,OXON,ENGLAND
关键词
D O I
10.1016/0040-6090(82)90050-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:219 / 224
页数:6
相关论文
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