ELECTRONIC SPUTTERING OF CONDENSED O-2

被引：40

作者：

GIBBS, KM ^{[1
]}

BROWN, WL ^{[1
]}

JOHNSON, RE ^{[1
]}

机构：

[1] AT&T BELL LABS,MURRAY HILL,NJ 07974

来源：

PHYSICAL REVIEW B | 1988年 / 38卷 / 16期

关键词：

D O I：

10.1103/PhysRevB.38.11001

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：11001 / 11007

页数：7

共 28 条

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