APPLICATION OF MICROWAVE REFLECTION TECHNIQUE TO MEASUREMENT OF TRANSIENT AND QUIESCENT ELECTRICAL CONDUCTIVITY OF SILICON

被引:23
作者
NABER, JA
SNOWDEN, DP
机构
关键词
D O I
10.1063/1.1684180
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A microwave reflection technique for measuring both the transient and quiescent electrical conductivity of semiconductors in a temperature range from 4.2 to 450 K is described. This technique eliminates the difficulties due to non-Ohmic contacts when making electrical measurements on semiconductors, particularly silicon. © 1969 The American Institute of Physics.
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页码:1137 / &
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