ELECTRON-SPECTROSCOPY FOR CHEMICAL-ANALYSIS STUDIES ON ELECTRON-BEAM EVAPORATED CUOX THIN-FILMS

被引：8

作者：

KOTHIYAL, GP ^{[1
]}

MUTHE, KP ^{[1
]}

VYAS, JC ^{[1
]}

GANDHI, DP ^{[1
]}

HANDU, VK ^{[1
]}

SINGH, KD ^{[1
]}

SABHARWAL, SC ^{[1
]}

GUPTA, MK ^{[1
]}

机构：

[1] BHABHA ATOM RES CTR,DIV FUEL CHEM,BOMBAY 400085,INDIA

来源：

THIN SOLID FILMS | 1994年 / 249卷 / 02期

关键词：

D O I：

10.1016/0040-6090(94)90751-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Electron spectroscopy for chemical analysis studies were carried out on CuOx films deposited onto yttria-stabilized zirconia single-crystal substrates by electron-beam evaporation under molecular beam epitaxy conditions. The measurements were taken without exposing the films to the atmosphere. The results show that copper oxide dissociates under electron-beam heating in high vacuum and the reassociation of copper and oxygen to form suboxide (CuOx) at the substrate is a function of its temperature. The maximum oxygen content was found to be about 46% of the starting source material at the growth temperature of 500 degrees C, above which the CuOx film starts to decompose.

引用

页码：140 / 143

页数：4

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