NUMERICAL-SIMULATION OF CRYSTAL-GROWTH - INFLUENCE OF MELT CONVECTION ON GLOBAL HEAT-TRANSFER AND INTERFACE SHAPE

被引:22
作者
RYCKMANS, Y
NICODEME, P
DUPRET, F
机构
[1] Unité de Mécanique Appliquée, Université Catholique de Louvain, Louvain-la-Neuve, B-1348
关键词
D O I
10.1016/S0022-0248(08)80010-3
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The numerical simulation of heat transfer in a Czochralski puller is considered. Particular attention is paid to the influence of melt convection on the shape of the melt-crystal interface and the thermal gradients within the melt and the crystal. Examples of germanium and gallium arsenide growth are analyzed. © 1990, Elsevier Science Publishers B.V.. All rights reserved.
引用
收藏
页码:702 / 706
页数:5
相关论文
共 12 条
  • [11] NICODEME P, 1988, 5TH P INT C SEM 3 5, P465
  • [12] WOUTERS P, 1985, THESIS U CATHOLIQUE