APPARATUS FOR MEASUREMENT OF STRESS IN VACUUM EVAPORATED FILMS

被引：14

作者：

PRIEST, JR

机构：

来源：

关键词：

D O I：

10.1063/1.1717249

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：1349 / +

页数：1

共 15 条

MURBACH, HP ;

WILMAN, H .

PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON SECTION B, 1953, 66 (407) :905-910

[12]

SIDDALL G, 1960, VACUUM, V9, P274

[13] The tension of metallic films deposited by electrolysis [J].

Stoney, GG .

[14] STRESS ANNEALING IN VACUUM DEPOSITED COPPER FILMS [J].

STORY, HS ;

HOFFMAN, RW .

PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON SECTION B, 1957, 70 (10) :950-960

[15] SIZE EFFECTS IN THIN SUPERCONDUCTING INDIUM FILMS [J].

TOXEN, AM .

PHYSICAL REVIEW, 1961, 123 (02) :442-+