GROWTH OF CUINSE2 BY 2 MAGNETRON SPUTTERING TECHNIQUES

The results of experiments characterizing CuInSe2 deposition by reactive magnetron sputtering and by a hybrid sputtering and evaporation technique are presented. Both techniques produce films with chemical and structural properties comparable with those commonly used for polycrystalline CuInSe2-based solar cells. The substrate material is shown to affect strongly the film chemistry. Films deposited on copper show a higher copper content due to diffusion of the substrate material into the film during growth. Layers deposited by the hybrid process on molybdenum exhibit lower indium and higher selenium contents than films on glass at all temperatures examined. Finally, copper, indium and selenium diffusion into molybdenum substrates was observed at all growth temperatures.