ROLE OF HCL IN PASSIVATION OF MOS STRUCTURES

[1] BURKHARDT PJ, 1966, IEEE T ELECTRON DEVI, VED13, P268

[2] NEUTRALIZATION OF NA+ IONS IN HCL-GROWN SIO2 [J]. APPLIED PHYSICS LETTERS, 1972, 20 (11) : 449 - &

[3] EFFECT OF HCL AND CL2 ON THERMAL OXIDATION OF SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (03) : 388 - &

[4] SCHLEGEL ES, 1967, IEEE T ELECTRON DEVI, VED14, P728

[5] ZAININGER KH, 1970, SOLID STATE TECHNOL, V13, P49

[6] ZAININGER KH, 1970, SOLID STATE TECH, V10, P46

[1] BURKHARDT PJ, 1966, IEEE T ELECTRON DEVI, VED13, P268

[2] NEUTRALIZATION OF NA+ IONS IN HCL-GROWN SIO2 [J]. APPLIED PHYSICS LETTERS, 1972, 20 (11) : 449 - &

[3] EFFECT OF HCL AND CL2 ON THERMAL OXIDATION OF SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (03) : 388 - &

[4] SCHLEGEL ES, 1967, IEEE T ELECTRON DEVI, VED14, P728

[5] ZAININGER KH, 1970, SOLID STATE TECHNOL, V13, P49

[6] ZAININGER KH, 1970, SOLID STATE TECH, V10, P46