OPTIMIZED DEPTH RESOLUTION IN ION-SPUTTERED AND LAPPED COMPOSITIONAL PROFILES WITH AUGER-ELECTRON SPECTROSCOPY

被引：42

作者：

LEA, C

SEAH, MP

机构：

来源：

THIN SOLID FILMS | 1981年 / 75卷 / 01期

关键词：

D O I：

10.1016/0040-6090(81)90393-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：67 / 86

页数：20

共 37 条

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