CHEMICAL-VAPOR-DEPOSITION OF COPPER FROM (HFAC)CUL COMPOUNDS

被引：74

作者：

HAMPDENSMITH, MJ ^{[1
]}

KODAS, TT ^{[1
]}

机构：

[1] UNIV NEW MEXICO,DEPT CHEM ENGN,ALBUQUERQUE,NM 87131

来源：

POLYHEDRON | 1995年 / 14卷 / 06期

关键词：

D O I：

10.1016/0277-5387(94)00401-Y

中图分类号：

O61 [无机化学];

学科分类号：

070301 ; 081704 ;

摘要：

[No abstract available]

引用

页码：699 / 732

页数：34

共 98 条

[1] NITRATO AND ACETYLACETONATO COMPLEXES OF COPPER(I)
ANDERSON, WA
CARTY, AJ
PALENIK, GJ
SCHREIBE.G
[J]. CANADIAN JOURNAL OF CHEMISTRY, 1971, 49 (05): : 761 - &
[2] ACCELERATED-DEPOSITION RATE AND HIGH-QUALITY FILM COPPER CHEMICAL-VAPOR-DEPOSITION USING A WATER-VAPOR ADDITION TO A HYDROGEN AND CU(HFA)(2) REACTION SYSTEM
AWAYA, N
ARITA, Y
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1993, 32 (9A): : 3915 - 3919
[3] AWAYA N, 1989, DIGEST TECHNICAL PAP, P103
[4] AWAYA N, 1991, ADV MET ULSI APPL, V5, P231
[5] SYNTHESIS AND CHARACTERIZATION OF 1,1,1,5,5,5-HEXAFLUOROACETYLACETONATO-(1,5-CYCLOOCTADIENE)SILVER(I) DIMER - AN UNUSUAL BETA-DIKETONATE COORDINATION MODE
BAILEY, A
CORBITT, TS
HAMPDENSMITH, MJ
DUESLER, EN
KODAS, TT
[J]. POLYHEDRON, 1993, 12 (14) : 1785 - 1792
[6] LIGAND-STABILIZED COPPER(I) HEXAFLUOROACETYLACETONATE COMPLEXES - NMR-SPECTROSCOPY AND THE NATURE OF THE COPPER ALKENE BOND
BAUM, TH
LARSON, CE
MAY, G
[J]. JOURNAL OF ORGANOMETALLIC CHEMISTRY, 1992, 425 (1-2) : 189 - 200
[7] CHEMICAL VAPOR-DEPOSITED COPPER FROM ALKYNE STABILIZED COPPER(I) HEXAFLUOROACETYLACETONATE COMPLEXES
BAUM, TH
LARSON, CE
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1993, 140 (01) : 154 - 159
[8] A NOVEL COPPER COMPLEX AND CVD PRECURSOR - (ETA-2-2-BUTYNE)COPPER(I) HEXAFLUOROACETYLACETONATE
BAUM, TH
LARSON, CE
[J]. CHEMISTRY OF MATERIALS, 1992, 4 (02) : 365 - 369
[9] THIN-LAYERS DEPOSITED BY THE PYROSOL PROCESS
BLANDENET, G
COURT, M
LAGARDE, Y
[J]. THIN SOLID FILMS, 1981, 77 (1-3) : 81 - 90
[10] CHANG YN, 1993, MAT RES S C, V282, P335

← 1 2 3 4 5 6 7 8 9 10 →