GROWTH AND CHARACTERIZATION OF BARIUM-TITANATE THIN-FILMS PREPARED BY METALORGANIC CHEMICAL-VAPOR-DEPOSITION

被引：26

作者：

KAISER, DL ^{[1
]}

VAUDIN, MD ^{[1
]}

GILLEN, G ^{[1
]}

HWANG, CS ^{[1
]}

ROBINS, LH ^{[1
]}

ROTTER, LD ^{[1
]}

机构：

[1] NATL INST STAND & TECHNOL,DIV SURFACE & MICROANAL SCI,GAITHERSBURG,MD 20899

来源：

JOURNAL OF CRYSTAL GROWTH | 1994年 / 137卷 / 1-2期

关键词：

Amorphous films - Anisotropy - Barium titanate - Chemical vapor deposition - Diffusion in solids - Epitaxial growth - Ferroelectric materials - Quartz - Raman spectroscopy - Substrates - Thin films - Transmission electron microscopy;

D O I：

10.1016/0022-0248(94)91261-0

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

Process conditions were established for the deposition of polycrystalline BaTiO3 thin films on fused quartz substrates in a research-scale metalorganic chemical vapor deposition (MOCVD) system. Resulting films were studied by X-ray powder diffraction (XRD), Raman spectroscopy, energy dispersive X-ray spectroscopy, transmission electron microscopy (TEM) and secondary ion mass spectroscopy (SIMS) techniques. Films rich in Ba (molar Ba/Ti > 1) contained the second phase Ba2TiO4, whereas films rich in Ti were composed mainly of an amorphous phase. Cross-sectional TEM and SIMS depth profile studies of slightly Ba-rich films (that appeared to be nearly pure BaTiO3 by XRD analysis) revealed that the films were actually composed of several layers. The multilayer structure consisted of a thin amorphous interdiffusion layer, an orthorhombic Ba2TiO4 layer, and a polycrystalline BaTiO3 film containing some amorphous material. Raman spectroscopy confirmed the presence of tetragonal BaTiO3 in the films.

引用

页码：136 / 140

页数：5

共 9 条

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