NEW METHOD FOR FABRICATING ULTRA-NARROW METALLIC WIRES

被引：10

作者：

OLSON, E

SPALDING, GC

GOLDMAN, AM

ROOKS, MJ

机构：

[1] UNIV MINNESOTA, SCH PHYS & ASTRON, MINNEAPOLIS, MN 55455 USA

[2] CORNELL UNIV, NATL NANOFABRICAT FACIL, ITHACA, NY 14850 USA

来源：

APPLIED PHYSICS LETTERS | 1994年 / 65卷 / 21期

关键词：

D O I：

10.1063/1.112553

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

An improved, cryogenic shadowed evaporation technique has been developed to produce ultra-narrow metallic wires. It has been used to create wires of Pd with widths less than 15 nm and as long as 800 nm. Arrays of wires covering areas as large as 6400 μm2 have been made. This method, which can be extended to other materials and structures, is presently limited by the grain size of the "template" material, and therefore holds promise for even finer linewidths.

引用

页码：2740 / 2742

页数：3

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