NUCLEATION OF MISFIT DISLOCATIONS IN STRAINED-LAYER EPITAXY IN THE GEXSI1-X/SI SYSTEM

被引：89

作者：

HULL, R

BEAN, JC

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 04期

关键词：

D O I：

10.1116/1.575800

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2580 / 2585

页数：6

共 25 条

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