ANGULAR-DISTRIBUTIONS OF SPUTTERED MO AND AG DURING HE+ AND AR+ ION-BOMBARDMENT

被引：14

作者：

EMMOTH, B

FRIED, T

BRAUN, M

机构：

来源：

JOURNAL OF NUCLEAR MATERIALS | 1978年 / 76-7卷 / 1-2期

关键词：

D O I：

10.1016/0022-3115(78)90125-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：129 / 135

页数：7

共 20 条

[1] COLLECTION AND SPUTTERING EXPERIMENTS WITH NOBLE GAS IONS [J].

ALMEN, O ;

BRUCE, G .

NUCLEAR INSTRUMENTS & METHODS, 1961, 11 (02) :257-278

[2] ANGULAR DISTRIBUTION OF SCATTERED AND SPUTTERED 40-KEV PARTICLES ON POLYCRYSTALLINE TARGETS [J].

FORMANN, E ;

VIEHBOCK, FP ;

WOTKE, H .

CANADIAN JOURNAL OF PHYSICS, 1968, 46 (06) :753-&

[3] SPUTTERING OF SILVER BY LIGHT IONS WITH ENERGIES FROM 2 TO 12 KEV [J].

GRONLUND, F ;

MOORE, WJ .

JOURNAL OF CHEMICAL PHYSICS, 1960, 32 (05) :1540-1545

[4]

Knudsen M., 1909, ANN PHYS, V333, P75, DOI [DOI 10.1002/ANDP.19093330106, 10.1002/andp.19093330106]

[5] ON MECHANISM OF SPUTTERING [J].

LEHMANN, C ;

SIGMUND, P .

PHYSICA STATUS SOLIDI, 1966, 16 (02) :507-&

[6] MOMENTUM DEPOSITION BY HEAVY-ION BOMBARDMENT AND AN APPLICATION TO SPUTTERING [J].

LITTMARK, U ;

SIGMUND, P .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1975, 8 (03) :241-245

[7]

OLSON NT, 1968, J APPL PHYS, V39, P4849

[8]

OLSON NT, 1968, J APPL PHYS, V39, P3579

[9] CONDENSATION COEFFICIENTS IN GROWTH OF CADMIUM AND ZINC FROM VAPOR [J].

RAPP, RA ;

POUND, GM ;

HIRTH, JP .

JOURNAL OF CHEMICAL PHYSICS, 1961, 34 (01) :184-+

[10] ON THE CONDENSATION COEFFICIENT IN THE GROWTH OF SILVER FROM THE VAPOR PHASE [J].

RAPP, RA ;

HIRTH, JP ;

POUND, GM .

CANADIAN JOURNAL OF PHYSICS, 1960, 38 (05) :709-712

← 1 2 →