PROGRESS IN CHEMICAL-VAPOR-DEPOSITION

被引：7

作者：

CARLSSON, JO ^{[1
]}

JANSSON, U ^{[1
]}

机构：

[1] UNIV UPPSALA,DEPT CHEM,THIN FILM & SURFACE CHEM GRP,S-75121 UPPSALA,SWEDEN

来源：

关键词：

D O I：

10.1016/0079-6786(93)90003-A

中图分类号：

O61 [无机化学];

学科分类号：

070301 ; 081704 ;

摘要：

[No abstract available]

引用

页码：237 / 292

页数：56

共 124 条

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